{"id":48174,"date":"2025-07-18T08:26:07","date_gmt":"2025-07-18T08:26:07","guid":{"rendered":"https:\/\/tubefurnacecn.com\/?p=48174"},"modified":"2025-07-18T08:26:09","modified_gmt":"2025-07-18T08:26:09","slug":"cvd-pecvd-tube-furnace","status":"publish","type":"post","link":"http:\/\/www.tubefurnacecn.com\/ar\/cvd-pecvd-tube-furnace\/","title":{"rendered":"\u0641\u0631\u0646 \u0627\u0644\u0623\u0646\u0628\u0648\u0628 CVD\/PECVD \u0627\u0644\u0623\u0646\u0628\u0648\u0628\u064a"},"content":{"rendered":"<p><strong>\u0641\u0631\u0646 \u0627\u0644\u0623\u0646\u0628\u0648\u0628 CVD\/PECVD \u0627\u0644\u0623\u0646\u0628\u0648\u0628\u064a<\/strong><\/p>\n\n\n\n<p>\u064a\u0633\u062a\u062e\u062f\u0645 \u0647\u0630\u0627 \u0627\u0644\u0641\u0631\u0646 \u0627\u0644\u0623\u0646\u0628\u0648\u0628\u064a \u0627\u0644\u0645\u062a\u0642\u062f\u0645 CVD\/PECVD \u062a\u0642\u0646\u064a\u0629 \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0628\u0627\u0644\u0628\u062e\u0627\u0631 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\u0627\u0644\u0644\u0627\u0633\u0644\u0643\u064a\u0629 \u0645\u0639\u062f\u0644\u0627\u062a \u062a\u0631\u0633\u064a\u0628 \u062a\u0635\u0644 \u0625\u0644\u0649 10\u00c5\/\u062b\u0627\u0646\u064a\u0629<\/li>\n\n\n\n<li>\u062a\u0636\u0645\u0646 \u0627\u0644\u062a\u063a\u0630\u064a\u0629 \u0627\u0644\u0645\u062a\u0637\u0648\u0631\u0629 \u0645\u062a\u0639\u062f\u062f\u0629 \u0627\u0644\u0646\u0642\u0627\u0637 \u0628\u0627\u0644\u062a\u0631\u062f\u062f\u0627\u062a \u0627\u0644\u0644\u0627\u0633\u0644\u0643\u064a\u0629 8% \u062a\u0648\u062d\u064a\u062f \u0633\u0645\u0643 8% (3\u03c3)<\/li>\n\n\n\n<li>\u0627\u062a\u0633\u0627\u0642 \u0627\u0644\u062f\u064f\u0641\u0639\u0627\u062a \u0645\u0646 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a (&lt;2% \u062a\u0628\u0627\u064a\u0646 \u0645\u0646 \u0631\u0643\u064a\u0632\u0629 \u0625\u0644\u0649 \u0631\u0643\u064a\u0632\u0629 \u0623\u062e\u0631\u0649)<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u0627\u0644\u062a\u0635\u0645\u064a\u0645 \u0627\u0644\u062d\u0631\u0627\u0631\u064a<\/strong>:\n<ul class=\"wp-block-list\">\n<li>\u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0642\u0635\u0648\u0649: 1200 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 (\u0623\u0633\u0644\u0627\u0643 \u0627\u0644\u062a\u0633\u062e\u064a\u0646 FeCrAl)<\/li>\n\n\n\n<li>\u062a\u062d\u0643\u0645 PID \u0642\u0627\u0628\u0644 \u0644\u0644\u0628\u0631\u0645\u062c\u0629 \u0628 50 \u062c\u0632\u0621\u064b\u0627 (\u062f\u0642\u0629 \u00b1 1 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629)<\/li>\n\n\n\n<li>\u0645\u0628\u064a\u062a \u0645\u0632\u062f\u0648\u062c \u0627\u0644\u062c\u062f\u0627\u0631 \u0645\u0628\u0631\u062f \u0628\u0627\u0644\u0647\u0648\u0627\u0621 (\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0633\u0637\u062d &lt;50 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629)<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a<\/strong>:\n<ul class=\"wp-block-list\">\n<li>\u0646\u0638\u0627\u0645 \u062a\u0648\u0632\u064a\u0639 \u0627\u0644\u063a\u0627\u0632 \u0627\u0644\u0645\u062a\u062e\u0635\u0635 \u0644\u062a\u0648\u0635\u064a\u0644 \u0627\u0644\u0633\u0644\u0627\u0626\u0641 \u0628\u0634\u0643\u0644 \u0645\u0648\u062d\u062f<\/li>\n\n\n\n<li>\u0645\u0631\u0627\u0642\u0628\u0629 \u062b\u0628\u0627\u062a \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0645\u0639 \u0645\u0637\u0627\u0628\u0642\u0629 \u0627\u0644\u0645\u0639\u0627\u0648\u0642\u0629 \u0627\u0644\u062a\u0644\u0642\u0627\u0626\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u062a\u0648\u0627\u0641\u0642 \u0645\u0639 \u0627\u0644\u063a\u0627\u0632\u0627\u062a \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u064a\u0629 (SiH\u2084\u060c NH\u2083\u060c \u0625\u0644\u062e) \u0648\u0627\u0644\u0628\u064a\u0626\u0627\u062a \u0627\u0644\u062e\u0627\u0645\u0644\u0629<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u0627\u0644\u0633\u0644\u0627\u0645\u0629 \u0648\u0627\u0644\u0645\u062a\u0627\u0646\u0629<\/strong>:\n<ul class=\"wp-block-list\">\n<li>\u0646\u0638\u0627\u0645 \u0634\u0641\u0629 \u0627\u0644\u0641\u0648\u0644\u0627\u0630 \u0627\u0644\u0645\u0642\u0627\u0648\u0645 \u0644\u0644\u0635\u062f\u0623 304 \u0645\u0632\u062f\u0648\u062c \u0627\u0644\u062e\u062a\u0645<\/li>\n\n\n\n<li>\u062f\u0639\u0627\u0626\u0645 \u0634\u0641\u0629 \u0642\u0627\u0628\u0644\u0629 \u0644\u0644\u062a\u0639\u062f\u064a\u0644 \u0644\u0625\u0637\u0627\u0644\u0629 \u0639\u0645\u0631 \u0623\u0646\u0628\u0648\u0628 \u0627\u0644\u0643\u0648\u0627\u0631\u062a\u0632<\/li>\n\n\n\n<li>\u0627\u0644\u062d\u0645\u0627\u064a\u0629 \u0645\u0646 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0632\u0627\u0626\u062f\u0629 \u0648\u0627\u0643\u062a\u0634\u0627\u0641 \u0627\u0644\u062a\u0633\u0631\u0628 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a<\/li>\n\n\n\n<li>\u0648\u0638\u064a\u0641\u0629 \u0627\u0644\u062a\u0648\u0642\u0641 \u0641\u064a \u062d\u0627\u0644\u0627\u062a \u0627\u0644\u0637\u0648\u0627\u0631\u0626<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u0623\u062f\u0627\u0621 \u0627\u0644\u062a\u0641\u0631\u064a\u063a<\/strong>:\n<ul class=\"wp-block-list\">\n<li>\u0627\u0644\u062a\u0641\u0631\u064a\u063a \u0627\u0644\u0623\u0633\u0627\u0633\u064a: -0.1 \u0645\u064a\u062c\u0627 \u0628\u0627\u0633\u0643\u0627\u0644 (7\u00d710-\u2074 \u0628\u0627\u0633\u0643\u0627\u0644 \u0645\u0639 \u062e\u064a\u0627\u0631 \u0627\u0644\u0645\u0636\u062e\u0629 \u0627\u0644\u062c\u0632\u064a\u0626\u064a\u0629)<\/li>\n\n\n\n<li>\u0646\u0638\u0627\u0645 \u0627\u0644\u062a\u0641\u0631\u064a\u063a \u0627\u0644\u062c\u0627\u0641 \u064a\u0645\u0646\u0639 \u062a\u0644\u0648\u062b 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\u0642\u0637\u0639\u0629)<\/li>\n\n\n\n<li>\u0645\u0636\u062e\u0629 \u062a\u0641\u0631\u064a\u063a \u0627\u0644\u0647\u0648\u0627\u0621 \u0630\u0627\u062a \u0627\u0644\u0631\u064a\u0634\u0629 \u0627\u0644\u062f\u0648\u0627\u0631\u0629 (1 \u0645\u062c\u0645\u0648\u0639\u0629)<\/li>\n\n\n\n<li>\u0633\u062f\u0627\u062f\u0627\u062a \u0637\u0631\u0641\u064a\u0629 (2 \u0642\u0637\u0639\u0629)<\/li>\n<\/ul>\n\n\n\n<p><strong>\u062a\u0631\u0642\u064a\u0627\u062a \u0627\u062e\u062a\u064a\u0627\u0631\u064a\u0629<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0646\u0638\u0627\u0645 \u0645\u062a\u0642\u062f\u0645 \u0644\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u063a\u0627\u0632\u0627\u062a:\n<ul class=\"wp-block-list\">\n<li>\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u062a\u062f\u0641\u0642 \u0627\u0644\u0643\u062a\u0644\u064a \u0645\u062a\u0639\u062f\u062f \u0627\u0644\u0642\u0646\u0648\u0627\u062a (MFC)<\/li>\n\n\n\n<li>\u0644\u0648\u062d\u0629 \u062e\u0644\u0637 \u0627\u0644\u063a\u0627\u0632 \u0645\u0639 \u0645\u0631\u0627\u0642\u0628\u0629 \u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0627\u0644\u062d\u0642\u064a\u0642\u064a<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>\u062d\u0632\u0645\u0629 \u062a\u0641\u0631\u064a\u063a \u0627\u0644\u0647\u0648\u0627\u0621 \u0627\u0644\u0645\u062d\u0633\u0651\u0646\u0629:\n<ul class=\"wp-block-list\">\n<li>\u0645\u062d\u0637\u0629 \u0627\u0644\u0636\u062e \u0627\u0644\u062c\u0632\u064a\u0626\u064a \u0627\u0644\u062a\u0648\u0631\u0628\u064a\u0646\u064a<\/li>\n\n\n\n<li>\u0646\u0638\u0627\u0645 \u0627\u0644\u0645\u0635\u064a\u062f\u0629 \u0628\u0627\u0644\u062a\u0628\u0631\u064a\u062f<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>\u0634\u0627\u0634\u0629 \u0644\u0645\u0633 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062f\u0642\u0629 7 \u0628\u0648\u0635\u0629 \u062a\u0639\u0645\u0644 \u0628\u0627\u0644\u0644\u0645\u0633<\/li>\n\n\n\n<li>\u062d\u062c\u0631\u0629 \u0642\u0641\u0644 \u0627\u0644\u062a\u062d\u0645\u064a\u0644 \u0644\u0644\u062a\u0628\u0627\u062f\u0644 \u0627\u0644\u0633\u0631\u064a\u0639 \u0644\u0644\u0631\u0643\u064a\u0632\u0629<\/li>\n\n\n\n<li>\u0646\u0638\u0627\u0645 \u0627\u0644\u0645\u0631\u0627\u0642\u0628\u0629 \u0627\u0644\u0628\u0635\u0631\u064a\u0629 \u0641\u064a \u0627\u0644\u0645\u0648\u0642\u0639<\/li>\n<\/ul>\n\n\n\n<p><strong>\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u0631\u0633\u064a\u0628 \u0646\u064a\u062a\u0631\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646\/\u0623\u0643\u0633\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646<\/li>\n\n\n\n<li>\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0627\u0644\u0631\u0642\u064a\u0642\u0629 \u063a\u064a\u0631 \u0627\u0644\u0645\u062a\u0628\u0644\u0648\u0631\u0629<\/li>\n\n\n\n<li>\u0637\u0644\u0627\u0621\u0627\u062a \u0627\u0644\u0643\u0631\u0628\u0648\u0646 \u0627\u0644\u0634\u0628\u064a\u0647 \u0628\u0627\u0644\u0645\u0627\u0633 (DLC)<\/li>\n\n\n\n<li>\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u062e\u0644\u0627\u064a\u0627 \u0627\u0644\u0643\u0647\u0631\u0648\u0636\u0648\u0626\u064a\u0629<\/li>\n\n\n\n<li>\u062a\u063a\u0644\u064a\u0641 \u062c\u0647\u0627\u0632 MEMS<\/li>\n\n\n\n<li>\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a \u0627\u0644\u0645\u0631\u0646\u0629<\/li>\n<\/ul>\n\n\n\n<p><strong>\u0627\u0644\u0645\u0632\u0627\u064a\u0627 \u0627\u0644\u062a\u0642\u0646\u064a\u0629<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0645\u0639\u0632\u0632 \u0628\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0644\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0628\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0645\u0646\u062e\u0641\u0636\u0629<\/li>\n\n\n\n<li>\u062a\u062d\u0643\u0645 \u062f\u0642\u064a\u0642 \u0641\u064a \u0627\u0644\u0633\u064f\u0645\u0643 (\u0627\u062a\u0633\u0627\u0642 \u0627\u0644\u062f\u0641\u0639\u0629 \u00b1 2%)<\/li>\n\n\n\n<li>\u062a\u0635\u0645\u064a\u0645 \u0645\u0639\u064a\u0627\u0631\u064a \u0644\u062a\u0631\u0642\u064a\u0627\u062a \u0639\u0645\u0644\u064a\u0629 \u0633\u0647\u0644\u0629<\/li>\n\n\n\n<li>\u0627\u0645\u062a\u062b\u0627\u0644 \u0627\u0644\u0633\u0644\u0627\u0645\u0629 \u0627\u0644\u0645\u0639\u062a\u0645\u062f \u0645\u0646 CE<\/li>\n\n\n\n<li>\u0647\u064a\u0643\u0644 \u0645\u0646 \u0627\u0644\u062f\u0631\u062c\u0629 \u0627\u0644\u0635\u0646\u0627\u0639\u064a\u0629 \u0644\u0644\u062a\u0634\u063a\u064a\u0644 \u0639\u0644\u0649 \u0645\u062f\u0627\u0631 \u0627\u0644\u0633\u0627\u0639\u0629 \u0637\u0648\u0627\u0644 \u0623\u064a\u0627\u0645 \u0627\u0644\u0623\u0633\u0628\u0648\u0639<\/li>\n<\/ul>\n\n\n\n<p>\u064a\u0648\u0641\u0631 \u0647\u0630\u0627 \u0627\u0644\u0646\u0638\u0627\u0645 CVD\/PECVD \u0644\u0644\u0628\u0627\u062d\u062b\u064a\u0646 \u0648\u0627\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u0645\u0646\u0635\u0629 \u0645\u062a\u0639\u062f\u062f\u0629 \u0627\u0644\u0627\u0633\u062a\u062e\u062f\u0627\u0645\u0627\u062a \u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062f\u0642\u0629. \u0625\u0646 \u0627\u0644\u062c\u0645\u0639 \u0628\u064a\u0646 \u0645\u0639\u062f\u0644\u0627\u062a \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0633\u0631\u064a\u0639\u0629 \u0648\u0627\u0644\u062a\u0648\u062d\u064a\u062f \u0627\u0644\u0645\u0645\u062a\u0627\u0632 \u0648\u0627\u0633\u062a\u0642\u0631\u0627\u0631 \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u064a\u062c\u0639\u0644\u0647 \u0645\u062b\u0627\u0644\u064a\u064b\u0627 \u0644\u0643\u0644 \u0645\u0646 \u0628\u064a\u0626\u0627\u062a \u0627\u0644\u0628\u062d\u062b \u0648\u0627\u0644\u062a\u0637\u0648\u064a\u0631 \u0648\u0628\u064a\u0626\u0627\u062a \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u062a\u062c\u0631\u064a\u0628\u064a.<\/p>","protected":false},"excerpt":{"rendered":"<p>CVD\/PECVD Tube Furnace This advanced CVD\/PECVD tube furnace utilizes plasma-enhanced chemical vapor deposition (PECVD) technology to deposit high-quality thin films on various substrates including metals, semiconductors, and insulators. Ideal for microelectronics, optoelectronics, flat-panel displays, and energy storage applications, it combines precision deposition capabilities with industrial-grade reliability. Key Features Standard Configuration Optional Upgrades Typical Applications Technical &#8230; <a title=\"\u0641\u0631\u0646 \u0627\u0644\u0623\u0646\u0628\u0648\u0628 CVD\/PECVD \u0627\u0644\u0623\u0646\u0628\u0648\u0628\u064a\" class=\"read-more\" href=\"http:\/\/www.tubefurnacecn.com\/ar\/cvd-pecvd-tube-furnace\/\" aria-label=\"Read more about CVD\/PECVD Tube Furnace\">\u0625\u0642\u0631\u0623 \u0627\u0644\u0645\u0632\u064a\u062f<\/a><\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[8],"tags":[],"class_list":["post-48174","post","type-post","status-publish","format-standard","hentry","category-tube-furnace"],"_links":{"self":[{"href":"http:\/\/www.tubefurnacecn.com\/ar\/wp-json\/wp\/v2\/posts\/48174","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.tubefurnacecn.com\/ar\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.tubefurnacecn.com\/ar\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.tubefurnacecn.com\/ar\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.tubefurnacecn.com\/ar\/wp-json\/wp\/v2\/comments?post=48174"}],"version-history":[{"count":1,"href":"http:\/\/www.tubefurnacecn.com\/ar\/wp-json\/wp\/v2\/posts\/48174\/revisions"}],"predecessor-version":[{"id":48175,"href":"http:\/\/www.tubefurnacecn.com\/ar\/wp-json\/wp\/v2\/posts\/48174\/revisions\/48175"}],"wp:attachment":[{"href":"http:\/\/www.tubefurnacecn.com\/ar\/wp-json\/wp\/v2\/media?parent=48174"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.tubefurnacecn.com\/ar\/wp-json\/wp\/v2\/categories?post=48174"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.tubefurnacecn.com\/ar\/wp-json\/wp\/v2\/tags?post=48174"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}