{"id":48369,"date":"2026-01-19T05:34:42","date_gmt":"2026-01-19T05:34:42","guid":{"rendered":"https:\/\/www.tubefurnacecn.com\/?p=48369"},"modified":"2026-01-19T06:50:40","modified_gmt":"2026-01-19T06:50:40","slug":"resistance-evaporation-coating-system","status":"publish","type":"post","link":"http:\/\/www.tubefurnacecn.com\/id\/resistance-evaporation-coating-system\/","title":{"rendered":"Resistance Evaporation Coating System"},"content":{"rendered":"
\n\n\n\n

Resistance Evaporation Deposition System \u2013 Compact & Reliable Thin Film Coating Solution<\/strong><\/h1>\n\n\n\n

Overview<\/h2>\n\n\n\n

The Resistance Evaporation Deposition System<\/strong> is a compact, high-performance thin film deposition instrument designed for laboratory-scale research and development<\/strong> in materials science, optoelectronics, and semiconductor applications. This system utilizes resistive heating<\/strong> to evaporate metal or organic materials in a controlled vacuum environment, enabling the deposition of high-purity, uniform thin films<\/strong> with excellent reproducibility.<\/p>\n\n\n\n

Ideal for coating functional electrodes, transparent conductive layers, organic semiconductors, and nanomaterials<\/strong>, this system is widely used in OLED, OPV, perovskite solar cells, microelectronics, and surface engineering<\/strong> research.<\/p>\n\n\n\n

With its small footprint, low power consumption, and user-friendly design<\/strong>, it is perfectly suited for installation in gloveboxes, fume hoods, or standard lab benches<\/strong>, making it an essential tool for academic and industrial R&D labs.<\/p>\n\n\n\n

\n\n\n\n

Fitur Utama<\/h2>\n\n\n\n
    \n
  • \u2705 Compact Design<\/strong>:
    Small size (L60\u00d7W60\u00d7H96 cm) allows placement in confined spaces such as gloveboxes or cleanroom benches.<\/li>\n\n\n\n
  • \u2705 Low Power Consumption<\/strong>:
    Designed for energy efficiency\u2014ideal for labs with limited electrical capacity.<\/li>\n\n\n\n
  • \u2705 High Stability & Reliability<\/strong>:
    Uses imported or domestically optimized components (e.g., vacuum pumps, vacuum gauges) to ensure long-term stability and minimal downtime.<\/li>\n\n\n\n
  • \u2705 Smart Control System<\/strong>:
    PLC + touchscreen intelligent control interface with automatic leak detection, fault alerts, and one-button vacuum shutdown<\/strong> for enhanced safety and ease of use.<\/li>\n\n\n\n
  • \u2705 Three-Temperature Zone Evaporation Source<\/strong>:
    Supports evaporation of metals (Al, Ag, Au, Cu)<\/strong> and organic materials (PEDOT:PSS, MoO\u2083, etc.)<\/strong> using independent resistive heaters.<\/li>\n\n\n\n
  • \u2705 Vacuum Compatibility<\/strong>:
    Achieves base pressure of 5\u00d710\u207b\u2075 Pa<\/strong> (equivalent to 5\u00d710\u207b\u2077 Torr) with mechanical + molecular pump configuration.<\/li>\n\n\n\n
  • \u2705 Film Thickness Monitoring<\/strong>:
    Optional imported or domestic quartz crystal thickness monitor<\/strong> enables real-time monitoring and control of deposition rate and film thickness.<\/li>\n\n\n\n
  • \u2705 Rotatable Substrate Holder<\/strong>:
    60\u00d760 mm substrate holder with 0\u201320 rpm adjustable rotation speed<\/strong>, ensuring uniform coating on substrates up to 300\u00b0C.<\/li>\n\n\n\n
  • \u2705 Water Cooling System<\/strong>:
    Integrated water-cooled copper boat and shield prevent overheating and improve material utilization.<\/li>\n<\/ul>\n\n\n\n
    \n\n\n\n

    Spesifikasi Teknis<\/h2>\n\n\n\n
    Parameter<\/th>Specification<\/th><\/tr><\/thead>
    Bahan Kamar<\/strong><\/td>1Cr18Ni9Ti stainless steel, welded structure, double sealing ring design<\/td><\/tr>
    Ukuran Kamar<\/strong><\/td>\u00d8180 mm \u00d7 300 mm<\/td><\/tr>
    Vacuum System<\/strong><\/td>Mechanical pump + diffusion\/molecular pump (domestic or imported optional)
    \u2022 Base pressure: 5\u00d710\u207b\u2075 Pa
    \u2022 Pumping speed: 24 L\/s
    \u2022 Vacuum gauge: Capacitance manometer (8\u00d710\u207b\u00b9\u2070 Pa range)
    \u2022 Valves: Electromagnetic valve + manual throttle valve<\/td><\/tr>
    Evaporation System<\/strong><\/td>Three-zone resistive evaporation sources
    \u2022 Water-cooled copper boats
    \u2022 2 kW inverters with surge protection
    \u2022 Anti-spatter shield plate<\/td><\/tr>
    Substrate Holder<\/strong><\/td>Rotatable stage (60\u00d760 mm), adjustable rotation speed: 0\u201320 rpm
    \u2022 Heating capability: up to 300\u00b0C
    \u2022 Option: angle-adjustable stage for oblique deposition<\/td><\/tr>
    Thickness Monitor<\/strong><\/td>Optional quartz crystal oscillator (in-situ monitoring of deposition rate and total thickness)<\/td><\/tr>
    Sistem Kontrol<\/strong><\/td>PLC + touch screen intelligent control system
    \u2022 Automatic leak detection
    \u2022 Fault diagnosis and alarm
    \u2022 One-key vacuum stop<\/td><\/tr>
    Dimensions (L\u00d7W\u00d7H)<\/strong><\/td>60 cm \u00d7 60 cm \u00d7 96 cm<\/td><\/tr>
    Power Supply<\/strong><\/td>220V \/ 380V AC, 50Hz<\/td><\/tr>
    Weight<\/strong><\/td>~80 kg<\/td><\/tr>
    Interface<\/strong><\/td>Pre-installed CF35 flange port for integration with other systems<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n
    \n

    \ud83d\udccc Custom configurations available for larger chamber, multi-source setups, or integration with glovebox systems.<\/em><\/p>\n<\/blockquote>\n\n\n\n

    \n\n\n\n

    Aplikasi<\/h2>\n\n\n\n
    Field<\/th>Application<\/th><\/tr><\/thead>
    Organic Electronics<\/strong><\/td>Electrode deposition for OLED, OPV, and OFET devices<\/td><\/tr>
    Photovoltaics<\/strong><\/td>Transparent conductive oxide (TCO) layer coating, back contact formation<\/td><\/tr>
    Semiconductors<\/strong><\/td>Metal gate deposition, interconnect layers<\/td><\/tr>
    Surface Engineering<\/strong><\/td>Functional coatings for sensors, MEMS, and biomedical devices<\/td><\/tr>
    Research & Development<\/strong><\/td>Thin film growth for material characterization, device prototyping<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n
    \n\n\n\n

    Why Choose Our Resistance Evaporation System?<\/h2>\n\n\n\n