{"id":48174,"date":"2025-07-18T08:26:07","date_gmt":"2025-07-18T08:26:07","guid":{"rendered":"https:\/\/tubefurnacecn.com\/?p=48174"},"modified":"2025-07-18T08:26:09","modified_gmt":"2025-07-18T08:26:09","slug":"cvd-pecvd-tube-furnace","status":"publish","type":"post","link":"http:\/\/www.tubefurnacecn.com\/ko\/cvd-pecvd-tube-furnace\/","title":{"rendered":"CVD\/PECVD \ud29c\ube0c \uc6a9\uad11\ub85c"},"content":{"rendered":"<p><strong>CVD\/PECVD \ud29c\ube0c \uc6a9\uad11\ub85c<\/strong><\/p>\n\n\n\n<p>\uc774 \ucca8\ub2e8 CVD\/PECVD \ud29c\ube0c \ud37c\ub2c8\uc2a4\ub294 \ud50c\ub77c\uc988\ub9c8 \uac15\ud654 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(PECVD) \uae30\uc220\uc744 \ud65c\uc6a9\ud558\uc5ec \uae08\uc18d, \ubc18\ub3c4\uccb4, \uc808\uc5f0\uccb4 \ub4f1 \ub2e4\uc591\ud55c \uae30\ud310\uc5d0 \uace0\ud488\uc9c8 \ubc15\ub9c9\uc744 \uc99d\ucc29\ud569\ub2c8\ub2e4. \ub9c8\uc774\ud06c\ub85c \uc77c\ub809\ud2b8\ub85c\ub2c9\uc2a4, \uad11\uc804\uc790, \ud3c9\ud310 \ub514\uc2a4\ud50c\ub808\uc774 \ubc0f \uc5d0\ub108\uc9c0 \uc800\uc7a5 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc774\uc0c1\uc801\uc778 \uc774 \uc7a5\ube44\ub294 \uc815\ubc00 \uc99d\ucc29 \uae30\ub2a5\uacfc \uc0b0\uc5c5 \ub4f1\uae09\uc758 \uc2e0\ub8b0\uc131\uc744 \uacb0\ud569\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p><strong>\uc8fc\uc694 \uae30\ub2a5<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\uc99d\ucc29 \uc131\ub2a5<\/strong>:\n<ul class=\"wp-block-list\">\n<li>RF \uae00\ub85c\uc6b0 \ubc29\uc804 \uae30\uc220\ub85c \ucd5c\ub300 10\u00c5\/s\uc758 \uc99d\ucc29 \uc18d\ub3c4 \ub2ec\uc131<\/li>\n\n\n\n<li>\uace0\uae09 \uba40\ud2f0\ud3ec\uc778\ud2b8 RF \ud53c\ub529\uc73c\ub85c 8% \ub450\uaed8 \uade0\uc77c\uc131(3\u03c3) \ubcf4\uc7a5<\/li>\n\n\n\n<li>\ubc18\ub3c4\uccb4\uae09 \ubc30\uce58 \uc77c\uad00\uc131(&lt;2% \uae30\ud310 \uac04 \ud3b8\ucc28)<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\uc5f4 \uc124\uacc4<\/strong>:\n<ul class=\"wp-block-list\">\n<li>\ucd5c\ub300 \uc628\ub3c4: 1200\u00b0C(FeCrAl \uc5f4\uc120)<\/li>\n\n\n\n<li>50-\uc138\uadf8\uba3c\ud2b8 \ud504\ub85c\uadf8\ub798\ubc0d \uac00\ub2a5 PID \uc81c\uc5b4(\u00b11\u00b0C \uc815\ud655\ub3c4)<\/li>\n\n\n\n<li>\uc774\uc911 \ubcbd \uacf5\ub7ad\uc2dd \ud558\uc6b0\uc9d5(\ud45c\uba74 \uc628\ub3c4 &lt;50\u00b0C)<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\ud504\ub85c\uc138\uc2a4 \uc81c\uc5b4<\/strong>:\n<ul class=\"wp-block-list\">\n<li>\uade0\uc77c\ud55c \uc804\uad6c\uccb4 \uc804\ub2ec\uc744 \uc704\ud55c \ud2b9\uc218 \uac00\uc2a4 \ubd84\ubc30 \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>\uc790\ub3d9 \uc784\ud53c\ub358\uc2a4 \ub9e4\uce6d\uc744 \ud1b5\ud55c \ud50c\ub77c\uc988\ub9c8 \uc548\uc815\uc131 \ubaa8\ub2c8\ud130\ub9c1<\/li>\n\n\n\n<li>\ubc18\uc751\uc131 \uac00\uc2a4(SiH\u2084, NH\u2083 \ub4f1) \ubc0f \ubd88\ud65c\uc131 \ud658\uacbd\uacfc \ud638\ud658 \uac00\ub2a5<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\uc548\uc804 \ubc0f \ub0b4\uad6c\uc131<\/strong>:\n<ul class=\"wp-block-list\">\n<li>304 \uc2a4\ud14c\uc778\ub9ac\uc2a4 \uc2a4\ud2f8 \uc774\uc911 \uc530 \ud50c\ub79c\uc9c0 \uc2dc\uc2a4\ud15c<\/li>\n\n\n\n<li>\uc11d\uc601 \ud29c\ube0c \uc218\uba85 \uc5f0\uc7a5\uc744 \uc704\ud55c \uc870\uc808\uc2dd \ud50c\ub79c\uc9c0 \uc9c0\uc9c0\ub300<\/li>\n\n\n\n<li>\uacfc\uc5f4 \ubcf4\ud638 \ubc0f \ub204\uc804 \uac10\uc9c0<\/li>\n\n\n\n<li>\ube44\uc0c1 \uc815\uc9c0 \uae30\ub2a5<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\uc9c4\uacf5 \uc131\ub2a5<\/strong>:\n<ul class=\"wp-block-list\">\n<li>\uae30\ubcf8 \uc9c4\uacf5: -0.1MPa(\ubd84\uc790 \ud38c\ud504 \uc635\uc158 \uc0ac\uc6a9 \uc2dc 7\u00d710-\u2074 Pa)<\/li>\n\n\n\n<li>\uac74\uc2dd \uc9c4\uacf5 \uc2dc\uc2a4\ud15c\uc73c\ub85c \uacf5\uc815 \uc624\uc5fc \ubc29\uc9c0<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n\n\n\n<p><strong>\ud45c\uc900 \uad6c\uc131<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uace0\uc21c\ub3c4 \uc11d\uc601 \uc6a9\uad11\ub85c \ud29c\ube0c(1\uac1c)<\/li>\n\n\n\n<li>RF \ud50c\ub77c\uc988\ub9c8 \ubc1c\uc0dd\uae30(13.56MHz)<\/li>\n\n\n\n<li>\uc9c4\uacf5 \ubc00\ubd09 \ud50c\ub79c\uc9c0 \uc5b4\uc148\ube14\ub9ac(1\uc138\ud2b8)<\/li>\n\n\n\n<li>\uc9c4\uacf5 \uc555\ub825 \uac8c\uc774\uc9c0(1\uac1c)<\/li>\n\n\n\n<li>\ub85c\ud130\ub9ac \ubca0\uc778 \uc9c4\uacf5 \ud38c\ud504(1\uc138\ud2b8)<\/li>\n\n\n\n<li>\uc5d4\ub4dc \ud50c\ub7ec\uadf8(2\uac1c)<\/li>\n<\/ul>\n\n\n\n<p><strong>\uc120\ud0dd\uc801 \uc5c5\uadf8\ub808\uc774\ub4dc<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uace0\uae09 \uac00\uc2a4 \uc81c\uc5b4 \uc2dc\uc2a4\ud15c:\n<ul class=\"wp-block-list\">\n<li>\uba40\ud2f0\ucc44\ub110 \uc9c8\ub7c9 \uc720\ub7c9 \ucee8\ud2b8\ub864\ub7ec(MFC)<\/li>\n\n\n\n<li>\uc2e4\uc2dc\uac04 \ubaa8\ub2c8\ud130\ub9c1\uc774 \uac00\ub2a5\ud55c \uac00\uc2a4 \ud63c\ud569 \ud328\ub110<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>\ud5a5\uc0c1\ub41c \uc9c4\uacf5 \ud328\ud0a4\uc9c0:\n<ul class=\"wp-block-list\">\n<li>\ud130\ubcf4 \ubd84\uc790 \ud38c\ud504 \uc2a4\ud14c\uc774\uc158<\/li>\n\n\n\n<li>\uadf9\uc800\uc628 \ud2b8\ub7a9 \uc2dc\uc2a4\ud15c<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li>7\uc778\uce58 HD \ud130\uce58\uc2a4\ud06c\ub9b0 \uc778\ud130\ud398\uc774\uc2a4<\/li>\n\n\n\n<li>\uc2e0\uc18d\ud55c \uae30\ud310 \uad50\uccb4\ub97c \uc704\ud55c \ub85c\ub4dc\ub77d \ucc54\ubc84<\/li>\n\n\n\n<li>\ud604\uc7a5 \uad11\ud559 \ubaa8\ub2c8\ud130\ub9c1 \uc2dc\uc2a4\ud15c<\/li>\n<\/ul>\n\n\n\n<p><strong>\uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c\/\uc0b0\ud654\ubb3c \uc99d\ucc29<\/li>\n\n\n\n<li>\ube44\uc815\uc9c8 \uc2e4\ub9ac\ucf58 \ubc15\ub9c9<\/li>\n\n\n\n<li>\ub2e4\uc774\uc544\ubaac\ub4dc \uc720\uc0ac \ud0c4\uc18c(DLC) \ucf54\ud305<\/li>\n\n\n\n<li>\ud0dc\uc591\uad11 \uc804\uc9c0 \uc81c\uc791<\/li>\n\n\n\n<li>MEMS \ub514\ubc14\uc774\uc2a4 \ucea1\uc290\ud654<\/li>\n\n\n\n<li>\uc720\uc5f0\ud55c \uc804\uc790 \uc81c\ud488 \uc81c\uc870<\/li>\n<\/ul>\n\n\n\n<p><strong>\uae30\uc220\uc801 \uc774\uc810<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc800\uc628 \uacf5\uc815\uc744 \uc704\ud55c \ud50c\ub77c\uc988\ub9c8 \uac15\ud654 \uc99d\ucc29<\/li>\n\n\n\n<li>\uc815\ubc00\ud55c \ub450\uaed8 \uc81c\uc5b4(\u00b12% \ubc30\uce58 \uc77c\uad00\uc131)<\/li>\n\n\n\n<li>\uc190\uc26c\uc6b4 \ud504\ub85c\uc138\uc2a4 \uc5c5\uadf8\ub808\uc774\ub4dc\ub97c \uc704\ud55c \ubaa8\ub4c8\uc2dd \uc124\uacc4<\/li>\n\n\n\n<li>CE \uc778\uc99d \uc548\uc804 \uaddc\uc815 \uc900\uc218<\/li>\n\n\n\n<li>\uc5f0\uc911\ubb34\ud734 24\uc2dc\uac04 \uc6b4\uc601\uc774 \uac00\ub2a5\ud55c \uc0b0\uc5c5 \ub4f1\uae09 \uad6c\uc870<\/li>\n<\/ul>\n\n\n\n<p>\uc774 CVD\/PECVD \uc2dc\uc2a4\ud15c\uc740 \uc5f0\uad6c\uc790\uc640 \uc81c\uc870\uc5c5\uccb4\uc5d0 \uace0\uc815\ubc00 \ubc15\ub9c9 \uc99d\ucc29\uc744 \uc704\ud55c \ub2e4\ubaa9\uc801 \ud50c\ub7ab\ud3fc\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \ube60\ub978 \uc99d\ucc29 \uc18d\ub3c4, \ub6f0\uc5b4\ub09c \uade0\uc77c\uc131 \ubc0f \uacf5\uc815 \uc548\uc815\uc131\uc774 \uacb0\ud569\ub418\uc5b4 \uc788\uc5b4 R&amp;D \ubc0f \ud30c\uc77c\ub7ff \uc0dd\uc0b0 \ud658\uacbd \ubaa8\ub450\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>CVD\/PECVD Tube Furnace This advanced CVD\/PECVD tube furnace utilizes plasma-enhanced chemical vapor deposition (PECVD) technology to deposit high-quality thin films on various substrates including metals, semiconductors, and insulators. Ideal for microelectronics, optoelectronics, flat-panel displays, and energy storage applications, it combines precision deposition capabilities with industrial-grade reliability. Key Features Standard Configuration Optional Upgrades Typical Applications Technical &#8230; <a title=\"CVD\/PECVD \ud29c\ube0c \uc6a9\uad11\ub85c\" class=\"read-more\" href=\"http:\/\/www.tubefurnacecn.com\/ko\/cvd-pecvd-tube-furnace\/\" aria-label=\"CVD\/PECVD Tube Furnace\uc5d0 \ub300\ud574 \ub354 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uc138\uc694\">\uc790\uc138\ud788 \ubcf4\uae30<\/a><\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[8],"tags":[],"class_list":["post-48174","post","type-post","status-publish","format-standard","hentry","category-tube-furnace"],"_links":{"self":[{"href":"http:\/\/www.tubefurnacecn.com\/ko\/wp-json\/wp\/v2\/posts\/48174","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.tubefurnacecn.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.tubefurnacecn.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.tubefurnacecn.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.tubefurnacecn.com\/ko\/wp-json\/wp\/v2\/comments?post=48174"}],"version-history":[{"count":1,"href":"http:\/\/www.tubefurnacecn.com\/ko\/wp-json\/wp\/v2\/posts\/48174\/revisions"}],"predecessor-version":[{"id":48175,"href":"http:\/\/www.tubefurnacecn.com\/ko\/wp-json\/wp\/v2\/posts\/48174\/revisions\/48175"}],"wp:attachment":[{"href":"http:\/\/www.tubefurnacecn.com\/ko\/wp-json\/wp\/v2\/media?parent=48174"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.tubefurnacecn.com\/ko\/wp-json\/wp\/v2\/categories?post=48174"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.tubefurnacecn.com\/ko\/wp-json\/wp\/v2\/tags?post=48174"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}